MEMS (Micro Electro Mechanical Systems) are sensors and actuators based on semiconductor microfabrication technology, and widely used as pressure sensors, accelerometers, gyroscopes, microphones, bandpass filters, inkjet printer heads, projector image engines, infrared sensors/imagers. You may be using a smartphone, a tablet computer, a TV game machine and/or cars, in all of which MEMS are used as key devices. LSI (Large Scale Integrated Circuits) are the brains of machines, whereas MEMS are sensory systems and connect human and machines.
Our laboratory is globally recognized as one of the most active research groups in the field of MEMS and micro/nanotechnology. We have prototyped many devices such as pressure sensors, accelerometers, gyroscopes, acoustic wave filters, microvalves, the world's smallest gas turbine generator, micro fuel cells, RF MEMS switches, optical scanners, micro rocket thrusters, tactile sensors for robots and integrated biosensors. Also, we have developed key technologies such as wafer-level MEMS packaging technology, micro/nano fabrication technology and system integration technology. Some of these works have been commercialized by intensive collaboration with industry .